| 参数 | Specifications | 技术指标 Technique data | |||||||||
| 测量范围 | Measuring ranges | 13.33Pa、 133.3Pa、 1.333kPa、 13.33kPa、 133.3kPa 0.1Torr、 1Torr、 10Torr、 100Torr、 1000Torr | |||||||||
| 测量精度 | Measuring accuracy | 0.5（at23℃）％ of reading | |||||||||
| 零点温度系数 | Zero temperature coefficient | 0.1 | 0.05 | 0.002 (％ of full-scale/℃) | |||||||
| 满量程温度系数 | Full-scale temperature coefficient | 0.01 | 0.005 (％ of full-reading/℃) | ||||||||
| 分辨率 | Resolution | 0.01 | 0.005 (％ of full-scale) | ||||||||
| 实用检测下限压力 | Practical detection of lower limit pressure | 0.05% (％ of full-scale) | |||||||||
| 使用控制下限压力 | Use the lower limit pressure control | 0.5% (％ of full-scale) | |||||||||
| 响应速度 | Response speed | 100ms | 30ms | ||||||||
| 加压上限 | Max. pressure limit | 130kPa | 200kPa | ||||||||
| 功耗 | power consumption | 0.5 W | |||||||||
| 供电电源 | Power supply | 24VDC | |||||||||
| 输出信号 | Output signal | 0~10V RS485数据通信，支持Modbus-RTU协议 | |||||||||
| 使用温度 | Using temperature | 0 ～50 ℃ | |||||||||
| 保管温度 | Preservation temperature | 0 ～70 ℃（非工作时） | |||||||||
半导体行业 
商业航天/航空